Development of reactive ion etching process for deep etching of silicon for micro-mixer device fabrication

Journal
DTIP 2014 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Date Issued
2014-03-09
Author(s)
Tiwari, Ruchi
Behera, Bhagaban
Chandra, Sudhir
Balasubramaniam, R.
Subjects