Effect of Polycrystallinity and Presence of Dielectric Phases on NC-FinFET Variability

Journal
Technical Digest - International Electron Devices Meeting, IEDM
Date Issued
2018-07-02
Author(s)
Lin, Yen Kai
Kao, Ming Yen
Liao, Yu Hung
Kushwaha, Pragya
Chatterjee, Korok
Duarte, Juan Pablo
Chang, Huan Lin
Salahuddin, Sayeef
Hu, Chenming