Reliability Analysis of Thermally Actuated MEMS Micromirror

ISSN
18761100
Date Issued
2023-01-01
Author(s)
Maharshi, Vikram
Agarwal, Ajay
DOI
10.1007/978-981-19-2308-1_43
Abstract
This paper presents a reliability analysis of thermally actuated MEMS micromirror devices. The various factors affecting the reliability of the MEMS micromirror device were analyzed and discussed. The reliability distribution function and lifetime of the MEMS micromirror were analyzed. The series and parallel model reliability model for MEMS micromirror were reported. The p-out-of-n redundancy model was considered to increase reliability for the MEMS micromirror device. This model gives more redundancy to it, and the failure of one or more devices does not affect the system performance.
Subjects