Errata: Optimization of laser machining process for the preparation of photomasks, and its application to microsystems fabrication

Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
Date Issued
2014-01-01
Author(s)
Kumar, Avinash
Kant, Rishi
Syed Nadeem, Akhtar
Tiwari, Nachiketa
Ramkumar, Janakrajan
Bhattacharya, Shantanu