Dynamics Study and Frequency Mode Matched Analysis of Tuning Fork MEMS Gyroscope

The emergence of the Micro-Electro-Mechanical-System (MEMS) gyroscope brings up novel market prospects and provides a wide application in consumer products for image stabilization, virtual reality, 3D mouses, video games, etc., which are low-cost and high-performance inertia devices. In automotive, such inertia devices are used for rollover detection, ride stabilization and many more vehicle safety applications. MEMS gyroscope integrated with GPS called MEMS inertia measurement unit (IMU) device brought into the defence applications such as monitoring and guiding aerial vehicles, micro airplanes, missiles and satellites. A tuning fork MEMS gyroscope is a widely used MEMS gyroscope with having uniform tuning fork structure in its design. It has two proof masses that are free to move since the construction is made of narrow beams of more considerable length, and the middle portion is anchored on the substrate.This paper discusses the dynamics of a tuning fork MEMS gyroscope, and resonant frequency mode match analysis has been performed using IntelliSuite 8.9 MEMS utility software to improve the device's sensitivity by reducing the resonant frequency mismatch between sense and drive mode operation.