Optimization of laser machining process for the preparation of photomasks, and its application to microsystems fabrication

Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
Date Issued
2013-01-01
Author(s)
Kumar, Avinash
Kant, Rishi
Akhtar, Syed Nadeem
Tiwari, Nachiketa
Ramkumar, Janakrajan
Bhattacharya, Shantanu
Subjects