Spacer Engineering in Negative Capacitance FinFETs

Journal
IEEE Electron Device Letters
Date Issued
2019-06-01
Author(s)
Lin, Yen Kai
Kao, Ming Yen
Zhou, Jiuren
Liao, Yu Hung
Dasgupta, Avirup
Kushwaha, Pragya
Salahuddin, Sayeef
Hu, Chenming
Subjects