FEM modelling and performance evaluation of a flexible film bulk acoustic resonator

In this article the F-FBAR device is designed by placing a piezoelectric material (PZT) between two metal (Al) electrodes on the top of a Bragg�s reflector structure (Bragg�s reflector is composed by placing high and low acoustic impedance materials placed on one over another) and this Bragg�s reflector configuration is mounted on a flexible substrate (polyethylene terephthalate (PET)). The resonance properties of a F-FBAR have been investigated through finite element method (FEM) simulations. The effects�of acoustic impedance layer thickness variation on the sensor efficiency�have been studied. This study gives new idea in designing of high-performance F-FBAR sensors. It is also reported that, for an enhancement in coupling coefficient bottom electrode must be placed just above the high acoustic impedance layer (W). However, for enhancement in the quality factor bottom electrode must be placed just above the low acoustic impedance layer (SiO2). � 2023, The Author(s), under exclusive licence to Springer-Verlag GmbH Germany, part of Springer Nature.